Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
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چکیده
منابع مشابه
Low Temperature Reactive Sputtering of Thin Aluminum Nitride Films on Metallic Nanocomposites
Piezoelectric aluminum nitride thin films were deposited on aluminum-molybdenum (AlMo) metallic nanocomposites using reactive DC sputtering at room temperature. The effect of sputtering parameters on film properties was assessed. A comparative study between AlN grown on AlMo and pure aluminum showed an equivalent (002) crystallographic texture. The piezoelectric coefficients were measured to be...
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ژورنال
عنوان ژورنال: PLOS ONE
سال: 2015
ISSN: 1932-6203
DOI: 10.1371/journal.pone.0133479